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IL C3800 Datasheet Access

  • ILC3800 brochure

    IL C3800

    • Split, merge and sort 300mm wafers
    • Up to 7 automatic FOUP Loadports
    • ISO 3 minienvironment (ISO 14644-1)
    • Suitable for PGV, AGV and OHT loading
    • Can be used as a wafer tranfer module in comparison with a measurement or inspection tool (EFEM)
    ...