IL 3000 Datasheet Access

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  IL 3000

  Wafer Marking System

  • Fonts: Dot Matrix (SEMI 5x9, 10x18, 15x23 and 9x17) Barcode (SEMI 412, IBM 412) 2D Code (SEMI T7)
  • Engrave Mode (optional)
  • Checksum: SEMI, IBM, customized (optional)
  • Serialization: Numeric, alphanumeric, IBM (ascending or descending)
  • Text position: Adjustable in X and Y direction
  • Repeatability: +/- 80μm X and Y direction
  • Marking Depth: 0.1μm – 100μm (depending on material type and process setup)

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