IL C3000 HT Datasheet Access

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  IL C3000 HT

  • Used for polished 300mm wafer (Softmarking)
  • Automatic wafer handling & alignment
    
  • UP to two FOUP loadports
  • ISO 3 Minienvironment (ISO 14644-1)
  • High throughput model with up to 180 wafer|hr

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