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IL C4600 Datasheet Access

  • IL C 4600 product specification

    IL C4600

    • Split, merge and sort 450mm wafers
    • Up to 6 automatic FOUP Loadports
    • ISO 3 minienvironment (ISO 14644-1)
    • Suitable for PGV, AGV and OHT loading
    • Can be used as a bridge tool (300/450mm)
    ...