Laser Systems

IL C3000

The IL C3000 and C3000HT from InnoLas are high-performance wafer marking systems for large-scale semiconductor manufacturing. Supporting Nd:YAG and CO2 lasers, they provide precise marking for 300 mm wafers with enhanced throughput and handling capabilities.

Models

C3000
C3000HT

Laser Type

IR (Co2 & Solid State)
UV (Solid State)
GR (Solid State)

Laser Systems

Semiconductor Processing

The IL C3000 and C3000HT by InnoLas Semiconductor are advanced wafer marking systems designed for the precision marking of 300 mm wafers in high-volume semiconductor production. These systems support Nd:YAG lasers at 355 nm (UV), 532 nm (Green), and 1064 nm (IR), as well as CO2 lasers at 10.6 µm (IR), enabling versatile marking options. Equipped with high-precision F-Theta lenses, digitally controlled galvo heads, and opto-mechanical alignment, the IL C3000 ensures accurate, high-contrast markings. Dot depths range from 0.1 µm to 100 µm, with dot diameters between 25 µm and 150 µm. Capable of handling up to 160 wafers per hour, the C3000HT model includes advanced handling features for higher throughput. Both models comply with SEMI standards and offer robust communication interfaces for seamless integration into modern production lines, making them ideal for semiconductor traceability and quality assurance applications.

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TLM Laser provided an exceptional service from start to finish—professional, efficient, and delivered exactly what we needed.

KEITH WALTERS
K.W. PROPERTY SERVICES

Very knowledgeable, professional company. They have been maintaining our laser systems for years.

BRIAN DAVIDSON
SHIN-ETSU HANDOTAI EUROPE LTD

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