Laser Systems
IL 4000

The IL 4000 from InnoLas is a high-capacity wafer marking system designed for precise, unique identification of 300 mm and 450 mm wafers. Supporting Nd:YAG and CO2 lasers, it ensures accurate and reliable marking for semiconductor applications.
Laser Type

Laser Systems
Semiconductor Processing
The IL 4000 by InnoLas Semiconductor is an advanced wafer marking system tailored for large-scale semiconductor manufacturing. It supports Nd:YAG lasers at 355 nm (UV), 532 nm (Green), and 1064 nm (IR), as well as CO2 lasers at 10.6 µm (IR), enabling versatile marking options. The system handles 300 mm and 450 mm wafers with opto-mechanical alignment and a single-arm robot equipped with a single-end effector. Capable of throughput up to 100 wafers per hour, the IL 4000 provides high-precision markings, including SEMI-standard fonts, barcodes, and 2D codes, with dot depths from 0.1 µm to 100 µm. Its robust design ensures consistent performance, meeting SEMI standards and integrating seamlessly with modern production lines. Optional features such as vacuum or edge-grip wafer handling and multiple loading stations enhance operational flexibility, making the IL 4000 ideal for high-volume traceability and quality control.
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